- hydrogen reactive ion etching
- Микроэлектроника: реактивное ионное травление в среде водорода
Универсальный англо-русский словарь. Академик.ру. 2011.
Универсальный англо-русский словарь. Академик.ру. 2011.
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Sputtering — is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic ions. It is commonly used for thin film deposition, etching and analytical techniques (see below). Physics of sputtering Physical… … Wikipedia
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
Ruthenium — (pronEng|ruːˈθiːniəm) is a chemical element that has the symbol Ru and atomic number 44. A rare transition metal of the platinum group of the periodic table, ruthenium is found associated with platinum ores and used as a catalyst in some platinum … Wikipedia
Plasma (physics) — For other uses, see Plasma. Plasma lamp, illustrating some of the more complex phenomena of a plasma, including filamentation. The colors are a result of relaxation of electrons in excited states to lower energy states after they have recombined… … Wikipedia
Fluoromethane — IUPAC name … Wikipedia
Fluorine — Fluorine, la. fluorum, meaning to flow ), is the chemical element with the symbol F and atomic number 9. Atomic fluorine is univalent and is the most chemically reactive and electronegative of all the elements. In its elementally isolated (pure)… … Wikipedia
Caesium — xenon ← caesium → barium Rb ↑ Cs ↓ Fr … Wikipedia
fluorine — /floor een, in, flawr , flohr /, n. Chem. the most reactive nonmetallic element, a pale yellow, corrosive, toxic gas that occurs combined, esp. in fluorite, cryolite, phosphate rock, and other minerals. Symbol: F; at. wt.: 18.9984; at. no.: 9.… … Universalium
Crystal oscillator — A miniature 4 MHz quartz crystal enclosed in a hermetically sealed HC 49/US package, used as the resonator in a crystal oscillator. A crystal oscillator is an electronic oscillator circuit that uses the mechanical resonance of a vibrating crystal … Wikipedia